Semiconductor device and fabrication method thereof

Assignee

• Semiconductor Energy Laboratory

Inventors

• Shunpei Yamazaki (6,629 patents)
• Satoshi Murakami (296 patents)
• Jun Koyama (1,514 patents)
• Yukio Tanaka (176 patents)
• Hidehito Kitakado (75 patents)
• Hideto Ohnuma (256 patents)

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