Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods and apparatuses for utilizing adaptive predictive algorithms and determining when to use the adaptive predictive algorithms for virtual metrology

Methods and apparatuses for utilizing adaptive predictive algorithms and determining when to use the adaptive predictive algorithms for virtual metrology

US Patent 9886009 · Granted Feb 6, 2018

Estimated economic value: $31,277,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Guardbands in substrate processing systems2025
Matching process controllers for improved matching of process2025
Guardbands in substrate processing systems2024
Value-independent situation identification and matching2023
Automatic and adaptive fault detection and classification limits2023
Methods and systems for applying run-to-run control and virtual metrology to red2021
Methods and systems for applying run-to-run control and virtual metrology to red2021
Matching process controllers for improved matching of process2021
Method and apparatus for determining when to perform or trigger events in semi-c2020
Methods and apparatuses for utilizing adaptive predictive algorithms and determi2019
Portable, adaptable equipment health user interface2018
Matching process controllers for improved matching of process2017