Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Front opening ring pod

Front opening ring pod

US Patent 9881820 · Granted Jan 30, 2018

Estimated economic value: $38,152,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pulsing RF coils of a plasma chamber in reverse synchronization2025
Symmetric coupling of coil to direct-drive radiofrequency power supplies2025
RF pulsing within pulsing for semiconductor RF plasma processing2025
Systems and methods for achieving peak ion energy enhancement with a low angular2025
Reduced footprint wafer handling platform2025
Matchless plasma source for semiconductor wafer fabrication2025
Automated transfer of edge ring requiring rotational alignment2024
Multi-level parameter and frequency pulsing with a low angular spread2024
Edge ring arrangement with moveable edge rings2024
Systems and methods for achieving peak ion energy enhancement with a low angular2024
Transfer robot for reduced footprint platform architecture2024
Systems for reverse pulsing2023