Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Micro-balance sensor integrated with atomic layer deposition chamber

Micro-balance sensor integrated with atomic layer deposition chamber

US Patent 9856563 · Granted Jan 2, 2018

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Formation of lithium-metal-oxygen layer and removal of lithium carbonate on soli2025
Formation of lithium-metal-oxygen layer and removal of lithium carbonate on soli2025
Modification of lithium ion electrode materials via atomic layer deposition tech2025
System for continuous atomic layer deposition2024
System for continuous atomic layer deposition2024
Sequential infiltration synthesis of group 13 oxide electronic materials2024
Method of making thin films of sodium fluorides and their derivatives by ALD2024
Thin-film catalyst with enhanced catalyst-support interactions2024
Atomic layer deposition for continuous, high-speed thin films2024
Atomic layer deposition for continuous, high-speed thin films2024
Method of tuning the conversion temperature of cubic phase of aluminum-doped lit2024
Atomic layer deposition of lithium boron comprising nanocomposite solid electrol2024