Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Detecting defects on a wafer using defect-specific and multi-channel information

Detecting defects on a wafer using defect-specific and multi-channel information

US Patent 9846930 · Granted Dec 19, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Protection of optical materials of optical components from radiation degradation2025
System and method for reducing sample noise using selective markers2025
Multi-element super resolution optical inspection system2025
Print check repeater defect detection2025
Selective marking of a substrate with fluorescent conjugated polymer probes havi2024
Crawling welding robot2024
Crawling welding robot and method of controlling the same2023
Anti-curling film2023
Material recovery systems for optical components2023
Multimode defect classification in semiconductor inspection2023
Defect inspection and review using transmissive current image of charged particl2022
Print check repeater defect detection2022