Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Reflective photomask, method for manufacturing same and program for making mask pattern

Reflective photomask, method for manufacturing same and program for making mask pattern

US Patent 9841667 · Granted Dec 12, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Signal processing device, OCT device, signal processing method, and program2025
Ophthalmic apparatus2023
Ophthalmic apparatus2022
Optical coherence tomographic device and light source2022
Exposure mask and manufacturing method of same2022
Ophthalmic apparatus2021
Optical coherence tomographic device and light source2021
Ophthalmic apparatus2021
Reflective mask and method for manufacturing reflective mask2018
Electrostatic chuck cleaner, cleaning method, and exposure apparatus2017
Method of correcting defects in a reflection-type mask and mask-defect correctio2015
Exposure method and exposure mask2013