Capacitance sensation unit of plane position measurement device

Assignee

• Hiwin Mikrosystem

Inventors

• Mikhail Tiapkin (3 patents)
• Gennady Tyapkin (3 patents)
• Aleksandr Balkovoi (3 patents)
• Galina Slivinskaya (1 patents)
• Victor Cacenkin (1 patents)

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