Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Mesh in mesh backplate for micromechanical microphone

Mesh in mesh backplate for micromechanical microphone

US Patent 9820059 · Granted Nov 14, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Modular vehicle computing system cooling systems2019
Doped substrate regions in MEMS microphones2018
Monolithic CMOS-MEMS microphones and method of manufacturing2017
Monolithic CMOS-MEMS microphones and method of manufacturing2017
MEMS device with acoustic leak control features2017
Multi-layer composite backplate for micromechanical microphone2017
Multi-layer composite backplate for micromechanical microphone2017
Trapped membrane2017
Monolithic CMOS-MEMS microphones and method of manufacturing2016
Monolithic CMOS-MEMS microphones and method of manufacturing2016
MEMS membrane overtravel stop2016
MEMS membrane overtravel stop2016