Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Opening angle measurement of an oscillating MEMS mirror

Opening angle measurement of an oscillating MEMS mirror

US Patent 9810902 · Granted Nov 7, 2017

Estimated economic value: $11,457,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

MEMS mirror driven by dual pulse drive signal2023
Envelope detection circuit for detection of opening angle of a movable MEMS mirr2022
Envelope detection circuit for detection of opening angle of a movable MEMS mirr2020
MEMS mirror driven by dual pulse drive signal2020
Method for controlling position of a linear MEMS mirror with variable resolution2020
Phase error measurement for oscillating mirrors2019
Method for operating a laser projector to have a uniform scan pattern2019
Opening angle measurement of an oscillating MEMS mirror2019