Photoresist removal

Assignee

• TSMC

Inventors

• Shang-Yuan Yu (8 patents)
• Shao-Yen Ku (36 patents)
• Hsiao Chien-Wen (3 patents)
• Shao-Fu Hsu (2 patents)
• Yuan-Chih Chiang (6 patents)
• Wen-Chang Tsai (13 patents)
• Jui-Chuan Chang (8 patents)

View full patent text on Google Patents →