Cold cathode ionization vacuum gauge

Assignee

• Mks Instruments

Inventors

• Gerardo A. Brucker (33 patents)
• Timothy C. Swinney (18 patents)
• Brandon J. Kelly (9 patents)
• Alfred A. Funari (2 patents)
• Michael N. Schott (14 patents)
• Kristian S. Schartau (6 patents)

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