Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Exposure apparatus and exposure method, and device manufacturing method

Exposure apparatus and exposure method, and device manufacturing method

US Patent 9772564 · Granted Sep 26, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Motor stator and method for manufacturing motor stator2024
Stator of rotating armature and assembly method thereof2021
Stepper motor2019
Coil insulating structure/bobbin with grooves for inserting insulating slot clos2018
Exposure apparatus, device production method, cleaning apparatus, cleaning metho2012
Stator for rotary electric machine2011
Stator for rotary electric machines2010
Electric motor2010
Electric motor2010
Stage device and exposure apparatus, and method of manufacturing a device2003
Stage apparatus including non-containing gas bearings and microlithography appar2003