Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Ben Peng Xun (2 patents)
- Fei Liu (270 patents)
- Meng Guo (17 patents)
- Hua Tang (14 patents)
- Haifeng Yang (9 patents)
US Patent 9755659 · Granted Sep 5, 2017