Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method to package multiple MEMS sensors and actuators at different gases and cavity pressures

Method to package multiple MEMS sensors and actuators at different gases and cavity pressures

US Patent 9725304 · Granted Aug 8, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Secure integrated circuit for smart haptics2025
Haptic actuator including field member within slotted opening of suspended coil 2023
Axisymmetric linear resonant actuators2023
Haptic actuator having a double-wound driving coil for temperature- and driving 2022
Estimation method for whole life cycle cost of power battery in echelon utilizat2022
Self-actuating hinge mechanism for electronic device2022
Magnetic photoacoustic composite non destructive testing device of power transmi2022
Haptic engine having a single sensing magnet and multiple hall-effect sensors2020
Methods of fabrication of flexible micro-thermoelectric generators2020
Closed-loop control of linear resonant actuator using back EMF and inertial comp2020
Haptic engine having moving coil structure powered by suspended flexible printed2019
MEMS device with reduced dynamic stress and methods2019