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Sensor device, force detecting device, robot, electronic component conveying apparatus, electronic component inspecting apparatus, and component machining apparatus

US Patent 9705069 · Granted Jul 11, 2017

Assignee

Seiko Epson

Inventors

Akira Matsuzawa (95 patents)
Toshiyuki Kamiya (51 patents)
Hiroki Kawai (94 patents)

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