Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pattern generation method for generating cell pattern including pattern element and assist pattern, recording medium, information processing apparatus, and mask fabrication method

Pattern generation method for generating cell pattern including pattern element and assist pattern, recording medium, information processing apparatus, and mask fabrication method

US Patent 9696618 · Granted Jul 4, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Detection apparatus, lithography apparatus, and article manufacturing method2025
Detection apparatus, lithography apparatus, and article manufacturing method2025
Fluid state estimation system, learning device, learning program, estimation dev2025
Facially responsive communication apparatus2022
Information service system and information service method for providing location2021
Method for generating pattern, storage medium, and information processing appara2017
Method for determining mask pattern, non-transitory recording medium, and inform2017
Mask pattern generation method and optical image calculation method2017
Intermediate transfer belt with elastic layer formed on base layer and image for2016
Transfer member and image formation apparatus2016
Resist pattern calculation method and calculation program storage medium2016
Superconducting wire material, superconducting wire material connection structur2016