Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma source enhanced with booster chamber and low cost plasma strength sensor

Plasma source enhanced with booster chamber and low cost plasma strength sensor

US Patent 9691592 · Granted Jun 27, 2017

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma flood gun for charged particle apparatus2023
System and method for reducing radiation-induced false counts in an inspection s2019
Plasma source enhanced with booster chamber and low cost plasma strength sensor2018
System and method for reducing radiation-induced false counts in an inspection s2017
Image intensifier tube design for aberration correction and ion damage reduction2017
High resolution high quantum efficiency electron bombarded CCD or CMOS imaging s2016
Method and apparatus for detecting buried defects2015
Method and apparatus for detecting buried defects2014
High brightness—multiple beamlets source for patterned X-ray production2009
Focused electron and ion beam systems2004