Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS balanced inertial angular sensor and method for balancing such a sensor

MEMS balanced inertial angular sensor and method for balancing such a sensor

US Patent 9689678 · Granted Jun 27, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Sensor with mechanical compensation frequency anisotropy2024
Sensor with mechanical compensation frequency anisotropy2024
Microdevice comprising at least two movable elements2022
Microdevice comprising at least two movable elements2022
Resonator configured to be integrated into an inertial angular sensor2022
Mobile mass suspension system comprising means of connecting the mobile mass wit2021
MEMS or NEMS device with stacked stop element2020
Inertial angular sensor of balanced MEMS type and method for balancing such a se2018
Sensor including moving masses and means for detecting relative movements of the2017
Sensor including moving masses and means for detecting relative movements of the2017
Method for controlling a piezoelectric device having a piezoelectric element mou2017
Inertial sensor with nested seismic masses and method for manufacturing such a s2017