Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High numerical aperture objective lens system

High numerical aperture objective lens system

US Patent 9671337 · Granted Jun 6, 2017

Estimated economic value: $7,144,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Invariable magnification multilevel optical device with telecentric converter2024
Lithographic patterning device multichannel position and level gauge2023
High numerical aperture objective lens system2016
Optical system, inspection system and manufacturing method2016
Inspection apparatus, lithographic apparatus, and device manufacturing method2016
Optical system, inspection system and manufacturing method2014
Thin film continuous spatially modulated grey attenuators and filters2013
Illumination system coherence remover with two sets of stepped mirrors2012
Illumination system coherence remover with a series of partially reflective surf2012
Illumination system with low telecentricity error and dynamic telecentricity cor2011
Lithographic apparatus and device manufacturing method2010
Optical system for transforming numerical aperture2010