Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma etching apparatus

Plasma etching apparatus

US Patent 9653357 · Granted May 16, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Wafer processing method2024
Operation management apparatus and operation management method of autonomous tra2024
Apparatus and method for processing wafer2024
Automated driving vehicle, and method for controlling the vehicle2024
Operation management apparatus and operation management method of autonomous tra2024
Delivery server, settlement system, computer readable recording medium, and tran2024
Server, wallet system, computer readable recording medium, and notification meth2024
Operation management apparatus of vehicle, operation management method, and tran2023
Multiple section showerhead assembly2023
Automatic running vehicle and operation management device for automatic running 2023
Transportation system, service management device, and service management method2023
Vehicle operation management device, operation management method, and transporta2023