Apparatus and method for fabricating nano resonator using laser interference lithography

Assignee

• Samsung
• Korea University Industrial & Academic Collaboration Foundation

Inventors

• Duck Hwan Kim (77 patents)
• In-sang Song (159 patents)
• Jea Shik Shin (55 patents)
• Ho Soo Park (18 patents)
• Jae-Sung Rieh (24 patents)
• Byeong Kwon Ju (27 patents)

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