Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate heat treatment apparatus

Substrate heat treatment apparatus

US Patent 9607868 · Granted Mar 28, 2017

Estimated economic value: $24,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate transfer device and substrate processing system2025
Substrate transfer apparatus and substrate processing system2024
Film thickness measuring apparatus and film thickness measuring method, and film2024
Substrate transfer apparatus and substrate processing system2023
Temperature measuring mechanism, temperature measuring method, and stage device2023
Sputtering device2022
Stage device and processing apparatus2022
Stage device and processing apparatus2022
Stage mechanism, processing apparatus, and method of operating the stage mechani2022
Method of forming later insulating films for MTJ2021
Perfume retainer member and aroma provision device2020
Sputtering apparatus and substrate processing apparatus2020