Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Alignment apparatus

Alignment apparatus

US Patent 9607389 · Granted Mar 28, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus for transferring substrate and method for transferring substrate2025
Substrate transport apparatus and substrate transport method2025
Substrate transfer apparatus, substrate processing system and substrate processi2024
Apparatus for transporting substrate, system for processing substrate, and metho2024
Substrate transfer device and substrate gripping determination method2024
Transport apparatus, semiconductor manufacturing apparatus, and transport method2023
Transfer device, processing system, and transfer method2022
Substrate detection apparatus, substrate detection method and substrate processi2019
Substrate conveying method and substrate processing system2019
Support information display method, maintenance support method of substrate proc2017
Posture holding device for holding part2017
Alignment apparatus and substrate processing apparatus2017