Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High aspect ratio openings

High aspect ratio openings

US Patent 9595387 · Granted Mar 14, 2017

Estimated economic value: $20,925,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor constructions, and semiconductor processing methods2023
Semiconductor constructions, and semiconductor processing methods2020
Method of forming an array of elevationally-extending strings of programmable me2020
Methods used in forming an array of elevationally-extending strings of memory ce2019
Semiconductor constructions2018
Methods of forming a substrate opening2016
Capacitor forming methods2015
Semiconductor constructions2015
Plasma processing with preionized and predissociated tuning gases and associated2015
Methods of forming a substrate opening2015
Gaseous compositions comprising hydrogen fluoride and an alkylated ammonia deriv2015
Apparatus and methods for capacitively coupled plasma vapor processing of semico2014