Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Detection apparatus, lithography apparatus and method of manufacturing article

Detection apparatus, lithography apparatus and method of manufacturing article

US Patent 9594315 · Granted Mar 14, 2017

Estimated economic value: $32,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Detection apparatus, lithography apparatus, and article manufacturing method2025
Measurement apparatus, lithography apparatus, and article manufacturing method2025
Detection apparatus, lithography apparatus, and article manufacturing method2025
Processing apparatus, measurement apparatus, lithography apparatus, method of ma2025
Imprint method, imprint apparatus, and article manufacturing method2024
Exposure apparatus, exposure method, and method of manufacturing article2024
Position detection apparatus, imprint apparatus, and article manufacturing metho2024
Exposure apparatus, exposure method, and method of manufacturing article2023
Imprint apparatus, imprinting method, and product manufacturing method2023
Imprint apparatus, imprinting method, and method for manufacturing article2021
Illumination apparatus, optical apparatus, imprint apparatus, projection apparat2020
Exposure apparatus and article manufacturing method2020