Assignee
Inventors
- Qiang Xu (103 patents)
- Chao Zhao (90 patents)
- Jun Luo (218 patents)
- Guilei Wang (18 patents)
- Tao Yang (239 patents)
- Junfeng Li (82 patents)
{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Method of depositing tungsten layer with improved adhesion and filling behavior", "item": "https://www.patentleaderboard.com/patent/9589809"}]}
Skip to contentUS Patent 9589809 · Granted Mar 7, 2017