Apparatus and method for transporting a vessel to and from a PECVD processing station

Assignee

• Sio2 Medical Products

Inventors

• John T. Felts (61 patents)
• Thomas E. Fisk (38 patents)
• Robert S. Abrams (56 patents)
• John Ferguson (22 patents)
• Jonathan R. Freedman (33 patents)
• Robert J. Pangborn (21 patents)
• Peter J. Sagona (31 patents)

View full patent text on Google Patents →