Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate support for use with multi-zonal heating sources

Substrate support for use with multi-zonal heating sources

US Patent 9570328 · Granted Feb 14, 2017

Estimated economic value: $30,741,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods of correlating zones of processing chambers, and related systems and met2025
Multizone lamp control and individual lamp control in a lamphead2025
Methods for detection using optical emission spectroscopy2025
Method for forming silicon-phosphorous materials2025
Temperature profile measurement and synchronized control on substrate and suscep2025
Methods and systems for cleaning high aspect ratio structures2024
Multi zone spot heating in EPI2024
Method for epitaxially depositing a material on a substrate by flowing a process2024
Gas injector for epitaxy and CVD chamber2024
Structure and material engineering methods for optoelectronic devices signal to 2024
Silicide film nucleation2024
Method and system for foreline deposition diagnostics and control2024