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Home › Exposure apparatus with irradiation device for irradiating optical element with pulsed light having infrared wavelength, and corresponding exposure method

Exposure apparatus with irradiation device for irradiating optical element with pulsed light having infrared wavelength, and corresponding exposure method

US Patent 9568835 · Granted Feb 14, 2017

Estimated economic value: $24,000 ⓘ

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