Polishing of hard substrates with soft-core composite particles

Assignee

• Sinmat
• University of Florida

Inventors

• Rajiv Singh (68 patents)
• Arul Chakkaravarthi Arjunan (11 patents)
• Kannan Balasundaram (3 patents)
• Deepika Singh (24 patents)
• Wei Bai (144 patents)

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