Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optical system illuminating surface to be illuminated, exposure apparatus, imprint apparatus, method for manufacturing article, optical element, and method for manufacturing optical system

Optical system illuminating surface to be illuminated, exposure apparatus, imprint apparatus, method for manufacturing article, optical element, and method for manufacturing optical system

US Patent 9563134 · Granted Feb 7, 2017

Estimated economic value: $37,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Photosensitive resin composition, method of manufacturing pattern cured film, cu2025
Image pickup apparatus that can suppress a focus position shift caused by temper2024
Photosensitive resin composition, method of manufacturing pattern cured product,2022
Photosensitive resin composition, cured pattern production method, cured product2022
Printing system, color profile management method, and management apparatus2020
User authentication method, monitoring system, monitoring apparatus, and electro2018
Exposure apparatus, and method of manufacturing device2017
Information mediation system, information mediation method, information accumula2017
Illumination optical system, exposure apparatus, and device manufacturing method2015
Fine powder of single crystalline diamond particles and a method for the product2013
Immersion exposure apparatus and device manufacturing method2012
Data transfer control device and electronic instrument2011