Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Storage and sub-atmospheric delivery of dopant compositions for carbon ion implantation

Storage and sub-atmospheric delivery of dopant compositions for carbon ion implantation

US Patent 9552990 · Granted Jan 24, 2017

Estimated economic value: $115,360,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods for gas phase selective etching of silicon-germanium layers2025
Method and system for optimized gas delivery with automated redundant pressure r2024
Solvents for acetylene fluid storage2024
Mobile support assembly for holding and transporting a container2023
Method for pretreating and recovering a rare gas from a gas contaminant stream e2023
Dopant fluid storage and dispensing systems utilizing high performance, structur2023
Dopant fluid storage and dispensing systems utilizing high performance, structur2023
Mobile support assembly for holding and transporting a container2022
Storage and delivery of antimony-containing materials to an ion implanter2021
Storage and delivery of antimony-containing materials to an ion implanter2021
Support assembly for a gas cylinder2020
Storage and delivery of antimony-containing materials to an ion implanter2020