Pressure sensor having cantilever and displacement measurement unit

Assignee

• Seiko Instruments
• The University Of Tokyo

Inventors

• Isao Shimoyama (24 patents)
• Kiyoshi Matsumoto (61 patents)
• Hidetoshi Takahashi (23 patents)
• Minh-Dung Nguyen (9 patents)
• Yoko Shinohara (34 patents)
• Takeshi Uchiyama (23 patents)
• Manabu Oumi (85 patents)
• Masataka Shinogi (38 patents)

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