Wafer cleaning device and method thereof

Assignee

• United Microelectronics

Inventors

• Hsin-Ting Tsai (8 patents)
• Cheng-Hung Yu (32 patents)
• Chin-Kuang Liu (5 patents)
• Ming-Hsin Lee (12 patents)
• Wei-Hong Chuang (9 patents)
• Kuei-Chang Tung (2 patents)
• Yan-Yi Lu (2 patents)
• Chin-Chin Wang (2 patents)

View full patent text on Google Patents →