Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Positioning apparatus, lithography apparatus, and article manufacturing method

Positioning apparatus, lithography apparatus, and article manufacturing method

US Patent 9523569 · Granted Dec 20, 2016

Estimated economic value: $51,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Estimation device, estimation method, and estimation program2025
Training device, detection system, training method, and training program2025
Band estimation device, band estimation method, and program2024
Evaluation device, evaluation method, and evaluation program2024
SiC single crystal, and SiC ingot2023
Detection device and detection method2023
Method for producing SiC single crystal, SiC single crystal, and SiC ingot2020
Sheet feeding apparatus2020
Lithography apparatus, pattern forming method, and method for manufacturing prod2019
Stage apparatus, lithography apparatus, and device manufacturing method2018
Optical coupling device2016
Optical coupling device2015