Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for etching high-k metal gate stack

Method for etching high-k metal gate stack

US Patent 9514943 · Granted Dec 6, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus for detecting an angle of rotation2020
3-D structured non-volatile memory device and method of manufacturing the same2017
Method for etching high-k metal gate stack2016
Method for etching high-k metal gate stack2016
Semiconductor device with buried bit line and method for fabricating the same2015
Semiconductor devices having buried metal silicide layers and methods of fabrica2015
Semiconductor device with buried bit line and method for fabricating the same2014
Semiconductor device and method of fabricating the same2013
Semiconductor device and method of fabricating the same2013
Method for fabricating semiconductor device2013
Diagnosis system of deficient and forceful pulse2012
Method of setting zone layout of recording medium, and apparatus using method2012