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Home › Encapsulation structure provided with a cap and a substrate to connect at least one nano-object onto a face of the substrate and to resume contact through the cap and method of manufacturing the structure

Encapsulation structure provided with a cap and a substrate to connect at least one nano-object onto a face of the substrate and to resume contact through the cap and method of manufacturing the structure

US Patent 9511992 · Granted Dec 6, 2016

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