High-resolution positioning device

Assignee

• Physik Instrumente (Pi)

Inventors

• Christoph Schäffel (1 patents)
• Michael Katzschmann (2 patents)
• Hans-Ulrich Mohr (1 patents)
• Carolin Walenda (2 patents)
• Rainer Glöβ (1 patents)
• Christian Rudolf (6 patents)

View full patent text on Google Patents →