Purification system with manifold assembly and removable filter cassette

Assignee

• Entegris

Inventors

• Marc Laverdiere (26 patents)
• Hirokazu Kuwabara (41 patents)
• Koichi Kurata (3 patents)
• John P. Puglia (15 patents)
• Ben Mai Pak Lee (3 patents)
• Louis Barrows, Jr. (3 patents)
• Kalyan Madhavaram (3 patents)
• Dmitri Menn (2 patents)
• J. Karl Niermeyer (26 patents)
• Craig Wallace Martland (1 patents)

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