Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › De-chuck control method and control device for plasma processing apparatus

De-chuck control method and control device for plasma processing apparatus

US Patent 9466519 · Granted Oct 11, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Double knit circular knitted fabric, manufacturing method thereof, knitted produ2025
Film capacitor, and film for film capacitors2024
Structure for automatic in-situ replacement of a part of an electrostatic chuck2022
Electric cable connecting terminal and method for connecting together electric c2020
Session relay equipment and session relay method2015
Electric circuit device, electric circuit module, and power converter2011
Plasma etching method2009
Etching method and apparatus, computer program and computer readable storage med2008
Train detection system and a train detection method2007
Elevator system utilizing wireless transmission units to exchange control inform2006
Transmitter and receiver device for train detection2006
Elevator system having terminals with wireless transmitting/receiving unit2005