Deposition substrate temperature and monitoring

Assignee

• RTX (Raytheon)

Inventors

• Richard S. Mullin (5 patents)
• Anatoly Kuzmichev (6 patents)
• Igor V. Belousov (11 patents)
• Yuriy G. Kononenko (5 patents)
• Oleg G. Pankov (2 patents)
• Dmitriy Ryzhikov (1 patents)

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