Multi-step deep reactive ion etching fabrication process for silicon-based terahertz components

Assignee

• Caltech

Inventors

• Cecile D. Jung-Kubiak (10 patents)
• Theodore Reck (7 patents)
• Goutam Chattopadhyay (21 patents)
• Unknown
• Robert H. Lin (9 patents)
• Imran Mehdi (12 patents)
• Choonsup Lee (15 patents)
• Ken B. Cooper (13 patents)
• Alejandro Peralta (6 patents)

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