Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Sensor structure and yaw rate sensor

Sensor structure and yaw rate sensor

US Patent 9453927 · Granted Sep 27, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

MEMS rotation rate sensor including combined driving and detection2020
Rocker device for a micromechanical Z sensor2018
Method for operating and/or for measuring a micromechanical device, and micromec2016
Method for operating and/or for measuring a micromechanical device, and micromec2016
Hybrid integrated component2016
Acceleration sensor and method for operating an acceleration sensor2016
Micromechanical component having a damping device2015
Micromechanical component having a damping device2015
Electrical device having a lubricated joint and a method for lubricating such a 2015
Method for manufacturing a cap for a MEMS component, and hybrid integrated compo2015
Hybrid intergrated component and method for the manufacture thereof2014
Micromechanical structures2014