Assignee
- Semiconductor Manufacturing International (Beijing)
- Semiconductor Manufacturing International (Shanghai)
Inventors
- Yipeng Chan (7 patents)
- Kijun Kim (1,195 patents)
- GuoXu Zhao (5 patents)
- Xiao Jing Ye (16 patents)
- Zhen Yang (16 patents)
US Patent 9449718 · Granted Sep 20, 2016