Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Storage container, shutter opening/closing unit of storage container, and wafer stocker using storage container and shutter opening/closing unit

Storage container, shutter opening/closing unit of storage container, and wafer stocker using storage container and shutter opening/closing unit

US Patent 9437466 · Granted Sep 6, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Transport device having local purge function2025
Pod opener2022
Thin plate substrate-holding device and transfer robot provided with this holdin2022
Thin-plate substrate holding finger and transfer robot provided with said finger2021
Load port and load port atmosphere replacing method2019
Container and loader for substrate2013
Method and system for teaching reference position of semiconductor wafer in auto2011
Sheet-like electronic component clean transfer device and sheet-like electronic 2009
Linear motor2008
Cylinder, load port using it, and production system2003
Rotary coating apparatus1983