Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of manufacturing mirror shells of a nested shells grazing incidence mirror

Method of manufacturing mirror shells of a nested shells grazing incidence mirror

US Patent 9421647 · Granted Aug 23, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Insert for a source chamber of an EUV radiation source2025
EUV radiation source, insert for an EUV radiation source and insert for an inser2023
Optical device and method of in situ treating an EUV optical component to enhanc2018
Foil trap and light source device using such foil trap2017
Optical device and method of in situ treating an EUV optical component to enhanc2015
Extreme UV radiation generating device comprising a contamination captor2014
Electrode system, in particular for gas discharge light sources2014
Foil trap device with improved heat resistance2014
Extreme UV radiation reflecting element comprising a sputter-resistant material2014
Method for the spatially resolved measurement of parameters in a cross section o2014
Method and apparatus for the generation of short-wavelength radiation by means o2013
Extreme UV radiation generating device comprising a corrosion-resistant material2013