Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus

Lithographic apparatus

US Patent 9417535 · Granted Aug 16, 2016

Estimated economic value: $7,826,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for determining a condition associated with a pellicle2024
Lithographic apparatus and device manufacturing method2020
Lithographic apparatus and a method of manufacturing a lithographic apparatus2019
Lithographic apparatus2019
Lithographic apparatus and device manufacturing method2019
Immersion lithographic apparatus and device manufacturing method2018
Lithographic apparatus and device manufacturing method2018
Lithographic apparatus2017
Lithographic apparatus2016
Lithographic apparatus and device manufacturing method2015
Lithographic apparatus and device manufacturing method2015
Lithographic apparatus and device manufacturing method2015