Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Transducer structure and method for MEMS devices

Transducer structure and method for MEMS devices

US Patent 9377487 · Granted Jun 28, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

MEMS device with reduced dynamic stress and methods2019
Method to test the quality factor of a MEMS gyroscope at chip probe2019
Multi-axis integrated MEMS inertial sensing device on single packaged chip2018
Integrated inertial sensing device2018
MEMS structure with improved shielding and method2018
Multi-axis MEMS rate sensor device2018
MEMS structure with improved shielding and method2018
Methods and structures of integrated MEMS-CMOS devices2018
Integrated inertial sensing device2017
Temperature compensation for MEMS devices2017
Method for fabricating a transducer apparatus2016
Method and structure for adding mass with stress isolation to MEMS structures2016