Reaction system for growing a thin film

Assignee

• Asm America

Inventors

• Mohith Verghese (51 patents)
• Kyle Fondurulia (26 patents)
• Carl Louis White (65 patents)
• Eric James Shero (129 patents)
• Darko Babic (4 patents)
• Herbert Terhorst (30 patents)
• Marko Peussa (5 patents)
• Min Yan (20 patents)

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