Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS device incorporating a fluidic path, and manufacturing process thereof

MEMS device incorporating a fluidic path, and manufacturing process thereof

US Patent 9321628 · Granted Apr 26, 2016

Estimated economic value: $1,360,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System and method to increase display area utilizing a plurality of discrete dis2025
Semiconductor device and method for manufacturing a semiconductor device2024
Semiconductor device and method for manufacturing a semiconductor device2024
MEMS piezoelectric device and corresponding manufacturing process2024
System and method to increase display area utilizing a plurality of discrete dis2023
MEMS piezoelectric device and corresponding manufacturing process2022
Method for manufacturing a semiconductor die provided with a filtering module, s2021
System and method to increase display area utilizing a plurality of discrete dis2021
Method for manufacturing microfluid delivery device2021
Method for manufacturing microfluid delivery device2021
Electrostatically actuated oscillating structure with oscillation starting phase2020
Electronic device with integrated temperature sensor and manufacturing method th2020